Octafluorocyclobutane

Octafluorocyclobutane, or perfluorocyclobutane, C4F8, is a compound of carbon and fluorine.

Its critical point is at 115.3 °C and 2.79 MPa.

Octafluorocyclobutane is a dimer of tetrafluoroethylene.

Octafluorocyclobutane is used in the production and processing of semiconductor materials and devices, for example as a deposition gas and etchant.

It has also been investigated as a refrigerant in specialised applications, as a replacement for Ozone depleting chlorofluorocarbon refrigerants.