SU-8 photoresist

For the heavy Soviet ground attack aircraft, see Sukhoi Su-8

SU-8 Photoresist description
SU-8 is a commonly used negative photoresist. It is a very viscous polymer that can be spun or spread over a thickness ranging from 1 micrometer up to 2 millimeters and still be processed with standard mask aligner. It can be used to pattern high aspect ratio (>20) structures. Its maximum absorption is for ultraviolet light with a wavelength of 365 nm. When exposed, SU-8's long molecular chains cross-link causing the solidification of the material.

SU-8 is mainly used in for fabrication of microfluidics and MEMS parts. It is also one of the most bio-compatible materials and is often used in bio-MEMS.

Links for SU-8
THE SU8 HOMEPAGE

SU-8: Thick Photo-Resist for MEMS A webpage with a lot of material data and process tricks.

SU-8 supplier

MSDS