Fluoromethane

Fluoromethane, also known as methyl fluoride, Freon 41, Halocarbon-41 and HFC-41, is a non-toxic, liquefiable, and flammable gas at standard temperature and pressure. It is used in the manufacture of semiconductor and electronic products. In the presence of an RF field fluoromethane will dissociate into fluoride ions that selectively etch silicon compound films.

Bond energy of C-F is 552 kJ/mol and its length is 0.139 nm (typically 0.14 nm).

Its specific heat capacity is Cp = 38.171 J.mol-1.K-1 at 25 °C. Critical point of fluoromethane is at 44.9 °C (318.1 K) and 6.280 MPa. Its global warming potential is GWP = 150.